| CM6200 | RM6210 | TM6200 | TM6200GT | |
|---|---|---|---|---|
| Acceleration | 1.0 G | 0.8 G | 1.0 G | 1.0 G |
| Payload | N/A | 1.5 kg (3,3 lbs.) | 1.0 kg | 1.0 kg |
| Z Travel |
|
100mm (3.9") |
|
|
| Z Resolution | 5 microns (0.0002") | |||
| Theta Range | 360¤ (±180¤) | |||
| Theta Resolution | 0.006¤ |
| Open Loop | Closed Loop (GridTrac) | |
|---|---|---|
| Repeatability | 12 microns (0.0005") nominal | 12 microns (0.0005") nominal |
| Accuracy | 50 microns (0.002") nominal | 25 microns (0.001") nominal |
| Move Resolution | 2.5 microns (.0001") | 0.5 microns (.00002") |
| Settling Time | 150 msec | 20 msec |